MEMS Accelerometers

• Main Author: Ngo, Ha Duong (auth)
• Other Authors: Rasras, Mahmoud (auth), Elfadel, Ibrahim (Abe) M. (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
• Subjects: History of engineering & technology; micromachining; n/a; turbulent kinetic energy dissipation rate; microelectromechanical systems (MEMS) piezoresistive sensor chip; WiFi-RSSI radio map; step detection; built-in self-test; regularity of activity; motion analysis; gait analysis; frequency; acceleration; MEMS accelerometer; zero-velocity update; rehabilitation assessment; vacuum microelectronic; dance classification; Kerr noise; MEMS; micro machining; MEMS sensors; stereo visual-inertial odometry; self-coaching; miniaturization; wavelet packet; three-axis acceleration sensor; MEMS-IMU accelerometer; performance characterization; electrostatic stiffness; delaying mechanism; three-axis accelerometer; angular-rate sensing; indoor positioning; whispering-gallery-mode; sensitivity; heat convection; multi-axis sensing; L-shaped beam; stride length estimation; activity monitoring; process optimization; mismatch of parasitic capacitance; electromechanical delta-sigma; cathode tips array; in situ self-testing; high acceleration sensor; deep learning; marine environmental monitoring; accelerometer; fault tolerant; hostile environment; micro-electro-mechanical systems (MEMS); low-temperature co-fired ceramic (LTCC); classification of horse gaits; Taguchi method; interface ASIC; capacitive transduction; digital resonator; safety and arming system; inertial sensors; MEMS technology; sleep time duration detection; field emission; probe; piezoresistive effect; capacitive accelerometer; auto-encoder; MEMS-IMU; body sensor network; optical microresonator; wireless; hybrid integrated; mode splitting
• Online Access: DOAB: download the publication; DOAB: description of the publication

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Acceleromete...