MEMS Accelerometers
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Acceleromete...
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Format: | Elektronski Book Chapter |
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MDPI - Multidisciplinary Digital Publishing Institute
2019
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