MEMS Accelerometers

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Acceleromete...

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Bibliografske podrobnosti
Glavni avtor: Ngo, Ha Duong (auth)
Drugi avtorji: Rasras, Mahmoud (auth), Elfadel, Ibrahim (Abe) M. (auth)
Format: Elektronski Book Chapter
Jezik:angleščina
Izdano: MDPI - Multidisciplinary Digital Publishing Institute 2019
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