MEMS/NEMS Sensors: Fabrication and Application

• Main Author: Koley, Goutam (auth)
• Other Authors: Jahangir, Ifat (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
• Subjects: History of engineering & technology; vibrating ring gyroscope; n/a; tunnel magnetoresistive effect; optical sensor; micro-NIR spectrometer; pulse inertia force; gas sensor; wet etching; oil detection; glass welding; spring design; power consumption; MEMS (micro-electro-mechanical system); back cavity; deflection position detector; magnetic; MEMS; single-layer SiO2; frequency tuning; threshold accuracy; suspended micro hotplate; AlGaN/GaN circular HFETs; quadrature modulation signal; inertial switch; nanoparticle sensor; low noise; photonic crystal nanobeam cavity; floating slug; infrared image; backstepping approach; microdroplet; acceleration switch; microgyroscope; temperature uniformity; methane; microfluidic; accelerometer design; photonic crystal cavity; anisotropy; resonant frequency; dual-mass MEMS gyroscope; analytical model; single crystal silicon; temperature sensor; micro fluidic; refractive index sensor; microwave measurement; low zero-g offset; femtosecond laser; micropellistor; rapid fabrication; accelerometer; tracking performance; GaN diaphragm; microactuator; resistance parameter; optomechanical sensor; scanning grating mirror; GaAs MMIC; adaptive control; frequency split; frequency mismatch; electrostatic force feedback; thermoelectric power sensor; squeeze-film damping; silicon; wideband; Accelerometer readout; bonding strength; high temperature pressure sensors; 3D simulation; level-set method; tetramethylammonium hydroxide (TMAH)
• Online Access: DOAB: download the publication; DOAB: description of the publication

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...