MEMS/NEMS Sensors: Fabrication and Application

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...

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Bibliografski detalji
Glavni autor: Koley, Goutam (auth)
Daljnji autori: Jahangir, Ifat (auth)
Format: Elektronički Poglavlje knjige
Jezik:engleski
Izdano: MDPI - Multidisciplinary Digital Publishing Institute 2019
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