Micro/Nano Manufacturing
Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...
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Formato: | Electrónico Capítulo de libro |
Lenguaje: | inglés |
Publicado: |
MDPI - Multidisciplinary Digital Publishing Institute
2017
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Acceso en línea: | DOAB: download the publication DOAB: description of the publication |
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DOAB: download the publicationDOAB: description of the publication
3rd Floor Main Library
Número de Clasificación: |
A1234.567 |
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Copia 1 | Disponible |