Micro/Nano Manufacturing

Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...

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Autor principal: Hans Nørgaard Hansen (Ed.) (auth)
Otros Autores: Guido Tosello (Ed.) (auth)
Formato: Electrónico Capítulo de libro
Lenguaje:inglés
Publicado: MDPI - Multidisciplinary Digital Publishing Institute 2017
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