Micro/Nano Manufacturing
Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...
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Format: | Electronic Book Chapter |
Language: | English |
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MDPI - Multidisciplinary Digital Publishing Institute
2017
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Online Access: | DOAB: download the publication DOAB: description of the publication |
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700 | 1 | |a Guido Tosello (Ed.) |4 auth | |
245 | 1 | 0 | |a Micro/Nano Manufacturing |
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520 | |a Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies. Furthermore, these fundamentally different technology platforms are currently combined in order to exploit the strengths of both platforms. One example is the use of lithography-based technologies to establish nanostructures that are subsequently transferred to 3D geometries via injection molding. Manufacturing processes at the micro-scale are the key-enabling technologies to bridge the gap between the nano- and the macro-worlds to increase the accuracy of micro/nano-precision production technologies, and to integrate different dimensional scales in mass-manufacturing processes. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in micro- and nano-scale manufacturing, i.e., on novel process chains including process optimization, quality assurance approaches and metrology. | ||
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546 | |a English | ||
650 | 7 | |a Energy industries & utilities |2 bicssc | |
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856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/53383 |7 0 |z DOAB: description of the publication |