Micro/Nano Manufacturing

• Main Author: Zimmermann, André (auth)
• Other Authors: Dimov, Stefan (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
• Subjects: Technology: general issues; path adaptability; uncertainty quantification; hardening; empirical mode decomposition; microlens array mold; gaussian process modeling; multi-objective particle swarm optimization; micro reactors; XRD; surface roughness; water impermeability tests; nanocone array; additive manufacturing; antireflection nanostructure; ultraprecision machining; Surface-enhanced Raman scattering; micro stereolithography; optical encoder; micro assembly; micro-optics; nanosphere array; micro-assembly; injection molding; Portland limestone ternary fiber-cement nanohybrids; hot embossing; deterministic polishing; micro-lens array; process parameter optimization; TGA/dTG; intrinsic mode function; micro factories; three-dimensional elliptical vibration cutting; flow control; micro-EDM molds; Image segmentation; micro actuators; culture dish adapter; flexural strength; SERS; low PC clinker; MIP; selective laser melting; micro sensors; friction coefficient; design of experiments; Ti6Al4V; micro-spring; contactless embossing; micro and nano additive manufacturing; Taguchi's method; nanoimprinting; perfusion culture; micro and nano manufacturing; data structure; fluid jet polishing; nitrogen supersaturation; spatial uncertainty modeling; active alignment; variable pitch path; conceptual design; feature extraction; blaze; micro-nozzle; product development; opto-ASIC; wafer-level optics; residual error optimization; stiffness control; surface engineering and interface nanotechnology; design for manufacturability; anodic aluminum oxide; plasma nitriding; micro 3D printing; hydrophobicity; grating; micro-fluidics; closed environment; chatter identification; small recess structure
• Online Access: DOAB: download the publication; DOAB: description of the publication

Micro manufacturing involves dealing with the fabrication of structures in the size range of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales-below 100 nm. A strict borderline between micro and nano manufacturing can hardly...