Micro/Nano Manufacturing
Micro manufacturing involves dealing with the fabrication of structures in the size range of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales-below 100 nm. A strict borderline between micro and nano manufacturing can hardly...
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Format: | Electronic Book Chapter |
Language: | English |
Published: |
MDPI - Multidisciplinary Digital Publishing Institute
2019
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Online Access: | DOAB: download the publication DOAB: description of the publication |
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