Piezoelectric MEMS

• Main Author: Ulrich Schmid (Ed.) (auth)
• Other Authors: Michael Schneider (Ed.) (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: MDPI - Multidisciplinary Digital Publishing Institute 2018
• Subjects: Energy industries & utilities; Piezoelectric MEMS resonators; Piezoelectric materials; Acoustic MEMS devices; Surface acoustic wave devices; Smart electronics for piezoelectric devices and systems; Piezoelectric energy harvesting; Packaging of piezoelectric MEMS; Simulation and modeling of piezoelectric MEMS
• Online Access: DOAB: download the publication; DOAB: description of the publication

Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...