Piezoelectric MEMS
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...
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Main Author: | Ulrich Schmid (Ed.) (auth) |
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Other Authors: | Michael Schneider (Ed.) (auth) |
Format: | Electronic Book Chapter |
Language: | English |
Published: |
MDPI - Multidisciplinary Digital Publishing Institute
2018
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Subjects: | |
Online Access: | DOAB: download the publication DOAB: description of the publication |
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