RF Probe-Induced On-Wafer Measurement Errors in the Millimeter-Wave Frequency Range

• Main Author: Müller, Daniel (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: KIT Scientific Publishing 2018
• Series: Karlsruher Forschungsberichte aus dem Institut für Hochfrequenztechnik und Elektronik
• Subjects: Technology: general issues; On-Wafer Measurements; Monolithic Microwave Integrated Circuits; Halbleiterschaltungen; Messtechnik; Hochfrequenztechnik; Electromagnetic Field Simulation; Elektromagnetische Feldsimulation; Radio Frequency
• Online Access: DOAB: download the publication; DOAB: description of the publication

Measurement at millimeter-wave frequencies are prone to parasitic effects which distort the overall results. Especially the use of RF probes introduces unknown distortions, even after the measurement setup is calibrated. This works investigates these distortions based on electromagnetic field simula...