RF Probe-Induced On-Wafer Measurement Errors in the Millimeter-Wave Frequency Range

Measurement at millimeter-wave frequencies are prone to parasitic effects which distort the overall results. Especially the use of RF probes introduces unknown distortions, even after the measurement setup is calibrated. This works investigates these distortions based on electromagnetic field simula...

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Bibliographic Details
Main Author: Müller, Daniel (auth)
Format: Electronic Book Chapter
Language:English
Published: KIT Scientific Publishing 2018
Series:Karlsruher Forschungsberichte aus dem Institut für Hochfrequenztechnik und Elektronik
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Online Access:DOAB: download the publication
DOAB: description of the publication
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520 |a Measurement at millimeter-wave frequencies are prone to parasitic effects which distort the overall results. Especially the use of RF probes introduces unknown distortions, even after the measurement setup is calibrated. This works investigates these distortions based on electromagnetic field simulations of integrated circuits in conjunction with models of the used RF probes. This allows to comprehend the observed distortions and successfully resolve the root of the distortions. 
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546 |a English 
650 7 |a Technology: general issues  |2 bicssc 
653 |a On-Wafer Measurements 
653 |a Monolithic Microwave Integrated Circuits 
653 |a Halbleiterschaltungen 
653 |a Messtechnik 
653 |a Hochfrequenztechnik 
653 |a Electromagnetic Field Simulation 
653 |a Elektromagnetische Feldsimulation 
653 |a Radio Frequency 
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