Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization...
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
KIT Scientific Publishing
2013
|
| Series: | Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel
|
| Subjects: | |
| Online Access: | DOAB: download the publication DOAB: description of the publication |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Internet
DOAB: download the publicationDOAB: description of the publication
3rd Floor Main Library
| Call Number: |
A1234.567 |
|---|---|
| Copy 1 | Available |