Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization...
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| Main Author: | |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
KIT Scientific Publishing
2013
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| Series: | Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel
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| Subjects: | |
| Online Access: | DOAB: download the publication DOAB: description of the publication |
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