Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications

• Egile nagusia: Meckbach, Johannes Maximilian (auth)
• Formatua: Baliabide elektronikoa Liburu kapitulua
• Hizkuntza: ingelesa
• Argitaratua: KIT Scientific Publishing 2013
• Saila: Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel
• Gaiak: Technology: general issues; Superconductor; Quantum; Multilayer; Cryogenics; Josephson
• Sarrera elektronikoa: DOAB: download the publication; DOAB: description of the publication

Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization...