X-ray optics made by X-ray lithography: Process optimization and quality control
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating st...
Guardado en:
| Autor principal: | |
|---|---|
| Formato: | Electrónico Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
KIT Scientific Publishing
2017
|
| Colección: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
|
| Materias: | |
| Acceso en línea: | DOAB: download the publication DOAB: description of the publication |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|
| Sumario: | Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work. |
|---|---|
| Descripción Física: | 1 electronic resource (X, 138 p. p.) |
| ISBN: | KSP/1000070029 9783731506799 |
| Acceso: | Open Access |