X-ray optics made by X-ray lithography: Process optimization and quality control
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating st...
Furkejuvvon:
| Váldodahkki: | |
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| Materiálatiipa: | Elektrovnnalaš Girjji oassi |
| Giella: | eaŋgalasgiella |
| Almmustuhtton: |
KIT Scientific Publishing
2017
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| Ráidu: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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| Fáttát: | |
| Liŋkkat: | DOAB: download the publication DOAB: description of the publication |
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| Čoahkkáigeassu: | Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work. |
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| Olgguldas hápmi: | 1 electronic resource (X, 138 p. p.) |
| ISBN: | KSP/1000070029 9783731506799 |
| Beassan: | Open Access |