X-ray optics made by X-ray lithography: Process optimization and quality control
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating st...
Enregistré dans:
| Auteur principal: | |
|---|---|
| Format: | Électronique Chapitre de livre |
| Langue: | anglais |
| Publié: |
KIT Scientific Publishing
2017
|
| Collection: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
|
| Sujets: | |
| Accès en ligne: | DOAB: download the publication DOAB: description of the publication |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
| Résumé: | Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work. |
|---|---|
| Description matérielle: | 1 electronic resource (X, 138 p. p.) |
| ISBN: | KSP/1000070029 9783731506799 |
| Accès: | Open Access |