X-ray optics made by X-ray lithography: Process optimization and quality control

• Main Author: Koch, Frieder Johannes (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: KIT Scientific Publishing 2017
• Series: Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
• Subjects: Technology: general issues; Talbot effect; Röntgengitter; LIGA; X-ray optics; Phasenkontrast; Talbot-Effect; phase contrast; X-ray gratings; Röntgenoptik
• Online Access: DOAB: download the publication; DOAB: description of the publication

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating st...