Micro Electronic and Mechanical Systems
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
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Format: | Electronic Book Chapter |
Language: | English |
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IntechOpen
2009
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Online Access: | DOAB: download the publication DOAB: description of the publication |
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700 | 1 | |a Takahata, Kenichi |4 oth | |
245 | 1 | 0 | |a Micro Electronic and Mechanical Systems |
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506 | 0 | |a Open Access |2 star |f Unrestricted online access | |
520 | |a This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. | ||
540 | |a Creative Commons |f https://creativecommons.org/licenses/by-nc-sa/3.0/ |2 cc |4 https://creativecommons.org/licenses/by-nc-sa/3.0/ | ||
546 | |a English | ||
650 | 7 | |a Electronics engineering |2 bicssc | |
653 | |a Electronics engineering | ||
856 | 4 | 0 | |a www.oapen.org |u https://mts.intechopen.com/storage/books/3333/authors_book/authors_book.pdf |7 0 |z DOAB: download the publication |
856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/64724 |7 0 |z DOAB: description of the publication |