Microelectromechanical Systems and Devices
The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...
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Format: | Elektronisch Buchkapitel |
Sprache: | Englisch |
Veröffentlicht: |
IntechOpen
2012
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Online-Zugang: | DOAB: download the publication DOAB: description of the publication |
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DOAB: download the publicationDOAB: description of the publication
3rd Floor Main Library
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