Microelectromechanical Systems and Devices

• Другие авторы: Islam, Nazmul (Редактор)
• Формат: Электронный ресурс Глава книги
• Язык: английский
• Опубликовано: IntechOpen 2012
• Предметы: Optical physics; Electricity, electromagnetism & magnetism
• Online-ссылка: DOAB: download the publication; DOAB: description of the publication

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...