Micro- and Nano-Fabrication by Metal Assisted Chemical Etching

Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates-Si, Ge, poly-Si, GaAs, and SiC-and using different catalysts-Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Awduron Eraill: Romano, Lucia (Golygydd)
Fformat: Electronig Pennod Llyfr
Iaith:Saesneg
Cyhoeddwyd: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute 2021
Pynciau:
Mynediad Ar-lein:DOAB: download the publication
DOAB: description of the publication
Tagiau: Ychwanegu Tag
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!

Rhyngrwyd

DOAB: download the publication
DOAB: description of the publication

3rd Floor Main Library

Manylion daliadau o 3rd Floor Main Library
Rhif Galw: A1234.567
Copi 1 Ar gael