Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates-Si, Ge, poly-Si, GaAs, and SiC-and using different catalysts-Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes...
Enregistré dans:
Autres auteurs: | |
---|---|
Format: | Électronique Chapitre de livre |
Langue: | anglais |
Publié: |
Basel, Switzerland
MDPI - Multidisciplinary Digital Publishing Institute
2021
|
Sujets: | |
Accès en ligne: | DOAB: download the publication DOAB: description of the publication |
Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
Internet
DOAB: download the publicationDOAB: description of the publication
3rd Floor Main Library
Cote: |
A1234.567 |
---|---|
Exemplaire 1 | Disponible |