Advanced Strategies in Thin Film Engineering by Magnetron Sputtering

Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reac...

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Andere auteurs: Palmero, Alberto (Redacteur), Martin, Nicolas (Redacteur)
Formaat: Elektronisch Hoofdstuk
Taal:Engels
Gepubliceerd in: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute 2020
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