Advanced Strategies in Thin Film Engineering by Magnetron Sputtering

Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reac...

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Detaylı Bibliyografya
Diğer Yazarlar: Palmero, Alberto (Editör), Martin, Nicolas (Editör)
Materyal Türü: Elektronik Kitap Bölümü
Dil:İngilizce
Baskı/Yayın Bilgisi: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute 2020
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Online Erişim:DOAB: download the publication
DOAB: description of the publication
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