High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...

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Váldodahkki: Luo, Ding (auth)
Materiálatiipa: Elektrovnnalaš Girjji oassi
Giella:eaŋgalasgiella
Almmustuhtton: Karlsruhe KIT Scientific Publishing 2021
Ráidu:Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
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Hildobáiki: A1234.567
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