APA (7th ed.) Citation

Jiménez, C., Bellet, D., Masse de la Huerta, C., Muñoz-Rojas, D., & Huong Nguyen, V. (2019). Chapter Spatial Atomic Layer Deposition. InTechOpen.

Chicago Style (17th ed.) Citation

Jiménez, Carmen, Daniel Bellet, César Masse de la Huerta, David Muñoz-Rojas, and Viet Huong Nguyen. Chapter Spatial Atomic Layer Deposition. InTechOpen, 2019.

MLA (9th ed.) Citation

Jiménez, Carmen, et al. Chapter Spatial Atomic Layer Deposition. InTechOpen, 2019.