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Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

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This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a...

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Bibliographic Details
Main Author: Taudt, Christopher (auth)
Format: Electronic Book Chapter
Language:English
Published: Bern Springer Nature 2022
Subjects:
Optical physics
Mensuration & systems of measurement
surface metrology
profilometry
interferometry
low-coherence interferometry
semiconductor manufacturing
optical metrology
Open Access
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