Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...

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Váldodahkki: Kopf, Marlene (auth)
Materiálatiipa: Elektrovnnalaš Girjji oassi
Almmustuhtton: Karlsruhe KIT Scientific Publishing 2022
Ráidu:Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie
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