Silicon Nanodevices

This book is a collection of scientific articles which brings research in Si nanodevices, device processing, and materials. The content is oriented to optoelectronics with a core in electronics and photonics. The issue of current technology developments in the nanodevices towards 3D integration and...

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その他の著者: Radamson, Henry (編集者), Wang, Guilei (編集者)
フォーマット: 電子媒体 図書の章
言語:英語
出版事項: Basel MDPI - Multidisciplinary Digital Publishing Institute 2022
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その他の書誌記述
要約:This book is a collection of scientific articles which brings research in Si nanodevices, device processing, and materials. The content is oriented to optoelectronics with a core in electronics and photonics. The issue of current technology developments in the nanodevices towards 3D integration and an emerging of the electronics and photonics as an ultimate goal in nanotechnology in the future is presented. The book contains a few review articles to update the knowledge in Si-based devices and followed by processing of advanced nano-scale transistors. Furthermore, material growth and manufacturing of several types of devices are presented. The subjects are carefully chosen to critically cover the scientific issues for scientists and doctoral students.
物理的記述:1 electronic resource (238 p.)
ISBN:books978-3-0365-4677-3
9783036546780
9783036546773
アクセス:Open Access