INVESTIGATIONS OF THIN TITANIUM OXIDE FILMS GROWN BY REACTIVE PULSED LASER DEPOSITION

INVESTIGATIONS OF THIN TITANIUM OXIDE FILMS GROWN BY REACTIVE PULSED LASER DEPOSITION

Titanium oxide thin films were deposited on Si monocrystalline substrate using the pulsed laser ablation technique in a reactive oxygen atmosphere. The films were obtained starting from Ti and TiO2 targets which were ablated using a KrF* excimer laser (λ = 248 nm). During the deposition, the Si subs...

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Main Authors: Gabriela Dorcioman (Author), Oana Fufa (Author), Valentin Craciun (Author), Marimona Miroiu (Author), Petronela Garoi (Author), Emanuel Axente (Author), Felix Sima (Author), Doina Craciun (Author)
Format: Book
Published: Romanian Society of Oral Rehabilitation, 2018-11-01T00:00:00Z.
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3rd Floor Main Library

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Call Number: A1234.567
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