INVESTIGATIONS OF THIN TITANIUM OXIDE FILMS GROWN BY REACTIVE PULSED LASER DEPOSITION

• Main Authors: Gabriela Dorcioman (Author), Oana Fufa (Author), Valentin Craciun (Author), Marimona Miroiu (Author), Petronela Garoi (Author), Emanuel Axente (Author), Felix Sima (Author), Doina Craciun (Author)
• Format: Book
• Published: Romanian Society of Oral Rehabilitation, 2018-11-01T00:00:00Z.
• Subjects: article
• Online Access: Connect to this object online.

Titanium oxide thin films were deposited on Si monocrystalline substrate using the pulsed laser ablation technique in a reactive oxygen atmosphere. The films were obtained starting from Ti and TiO2 targets which were ablated using a KrF* excimer laser (λ = 248 nm). During the deposition, the Si subs...