INVESTIGATIONS OF THIN TITANIUM OXIDE FILMS GROWN BY REACTIVE PULSED LASER DEPOSITION

• Päätekijät: Gabriela Dorcioman (Tekijä), Oana Fufa (Tekijä), Valentin Craciun (Tekijä), Marimona Miroiu (Tekijä), Petronela Garoi (Tekijä), Emanuel Axente (Tekijä), Felix Sima (Tekijä), Doina Craciun (Tekijä)
• Aineistotyyppi: Kirja
• Julkaistu: Romanian Society of Oral Rehabilitation, 2018-11-01T00:00:00Z.
• Aiheet: article
• Linkit: Connect to this object online.

Titanium oxide thin films were deposited on Si monocrystalline substrate using the pulsed laser ablation technique in a reactive oxygen atmosphere. The films were obtained starting from Ti and TiO2 targets which were ablated using a KrF* excimer laser (λ = 248 nm). During the deposition, the Si subs...