Exposure to Volatile Organic Compounds and Possibility of Exposure to By-product Volatile Organic Compounds in Photolithography Processes in Semiconductor Manufacturing Factories

• Main Authors: Seung-Hyun Park (Author), Jung-Ah Shin (Author), Hyun-Hee Park (Author), Gwang Yong Yi (Author), Kwang-Jae Chung (Author), Hae-Dong Park (Author), Kab-Bae Kim (Author), In-Seop Lee (Author)
• Format: Book
• Published: Elsevier, 2011-09-01T00:00:00Z.
• Subjects: article
• Online Access: Connect to this object online.

Objectives: The purpose of this study was to measure the concentration of volatile organic compound (VOC)s originated from the chemicals used and/or derived from the original parental chemicals in the photolithography processes of semiconductor manufacturing factories. Methods: A total of four photo...