A Comprehensive Review on the Optical Micro-Electromechanical Sensors for the Biomedical Application

• Main Authors: Anup M. Upadhyaya (Author), Mohammad Kamrul Hasan (Author), S. Abdel-Khalek (Author), Rosilah Hassan (Author), Maneesh C. Srivastava (Author), Preeta Sharan (Author), Shayla Islam (Author), Asma Mohammed Elbashir Saad (Author), Nguyen Vo (Author)
• Format: Book
• Published: Frontiers Media S.A., 2021-12-01T00:00:00Z.
• Subjects: article
• Online Access: Connect to this object online.

This study presented an overview of current developments in optical micro-electromechanical systems in biomedical applications. Optical micro-electromechanical system (MEMS) is a particular class of MEMS technology. It combines micro-optics, mechanical elements, and electronics, called the micro-opt...