Quantitative Exposure Assessment of Various Chemical Substances in a Wafer Fabrication Industry Facility
Objectives: This study was designed to evaluate exposure levels of various chemicals used in wafer fabrication product lines in the semiconductor industry where work-related leukemia has occurred. Methods: The research focused on 9 representative wafer fabrication bays among a total of 25 bays in a...
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| Автори: | , , |
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| Формат: | Книга |
| Опубліковано: |
Elsevier,
2011-03-01T00:00:00Z.
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| Онлайн доступ: | Connect to this object online. |
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Connect to this object online.3rd Floor Main Library
| Шифр: |
A1234.567 |
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| Примірник 1 | Доступно |