Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry

Background: The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material safet...

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Main Authors: Miyeon Jang (Author), Chungsik Yoon (Author), Jihoon Park (Author), Ohhun Kwon (Author)
Format: Book
Published: Elsevier, 2019-03-01T00:00:00Z.
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3rd Floor Main Library

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Call Number: A1234.567
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