Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
Taylor & Francis
2009
|
| Subjects: | |
| Online Access: | OAPEN Library: download the publication OAPEN Library: description of the publication |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. This comprehensive text also presents design techniques using polymeric additives to improve CMP performance. |
|---|---|
| ISBN: | 9780429291890 9781000023220 9780367446062 9781420059113 9781420059137 |
| Access: | Open Access |