Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
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| Format: | Electronisk Book Chapter |
| Sprog: | engelsk |
| Udgivet: |
Taylor & Francis
2009
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| Fag: | |
| Online adgang: | OAPEN Library: download the publication OAPEN Library: description of the publication |
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