High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...

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Xehetasun bibliografikoak
Egile nagusia: Luo, Ding (auth)
Formatua: Baliabide elektronikoa Liburu kapitulua
Hizkuntza:ingelesa
Argitaratua: Karlsruhe KIT Scientific Publishing 2021
Saila:Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung 2
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