High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding
An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...
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| Main Author: | |
|---|---|
| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
Karlsruhe
KIT Scientific Publishing
2021
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| Series: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
2 |
| Subjects: | |
| Online Access: | OAPEN Library: download the publication OAPEN Library: description of the publication |
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| 245 | 1 | 0 | |a High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding |
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| 520 | |a An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically accelerating the speed of 3D confocal microscopy. | ||
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| 653 | |a chromatisch | ||
| 653 | |a konfokal | ||
| 653 | |a 3D Messtechnik | ||
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