High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding
An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...
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Materialtyp: | Elektronisk Bokavsnitt |
Språk: | engelska |
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Karlsruhe
KIT Scientific Publishing
2021
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Serie: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
2 |
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Länkar: | OAPEN Library: download the publication OAPEN Library: description of the publication |
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Internet
OAPEN Library: download the publicationOAPEN Library: description of the publication
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A1234.567 |
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