High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...

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Bibliografiska uppgifter
Huvudskapare: Luo, Ding (auth)
Materialtyp: Elektronisk Bokavsnitt
Språk:engelska
Publicerad: Karlsruhe KIT Scientific Publishing 2021
Serie:Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung 2
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