Jiménez, C., Bellet, D., Masse de la Huerta, C., Muñoz-Rojas, D., & Huong Nguyen, V. (2019). Chapter Spatial Atomic Layer Deposition. InTechOpen.
Chicago Style (17th ed.) ZitazioaJiménez, Carmen, Daniel Bellet, César Masse de la Huerta, David Muñoz-Rojas, eta Viet Huong Nguyen. Chapter Spatial Atomic Layer Deposition. InTechOpen, 2019.
MLA (9th ed.) ZitazioaJiménez, Carmen, et al. Chapter Spatial Atomic Layer Deposition. InTechOpen, 2019.
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