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Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

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This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Kaituhi matua: Taudt, Christopher (auth)
Hōputu: Tāhiko Wāhanga pukapuka
Reo:Ingarihi
I whakaputaina: Bern Springer Nature 2022
Ngā marau:
Optical physics
Mensuration & systems of measurement
surface metrology
profilometry
interferometry
low-coherence interferometry
semiconductor manufacturing
optical metrology
Open Access
Urunga tuihono:OAPEN Library: download the publication
OAPEN Library: description of the publication
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Ipurangi

OAPEN Library: download the publication
OAPEN Library: description of the publication

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Tau karanga: A1234.567
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