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Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

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This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a...

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Dettagli Bibliografici
Autore principale:	Taudt, Christopher (auth)
Natura:	Elettronico Capitolo di libro
Lingua:	inglese
Pubblicazione:	Bern Springer Nature 2022
Soggetti:	Optical physics Mensuration & systems of measurement surface metrology profilometry interferometry low-coherence interferometry semiconductor manufacturing optical metrology Open Access
Accesso online:	OAPEN Library: download the publication OAPEN Library: description of the publication
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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