Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...
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| Format: | Electronic Book Chapter |
| Published: |
Karlsruhe
KIT Scientific Publishing
2022
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| Series: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie
42 |
| Subjects: | |
| Online Access: | OAPEN Library: download the publication OAPEN Library: description of the publication |
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| 245 | 1 | 0 | |a Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis |
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| 490 | 1 | |a Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie |v 42 | |
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| 520 | |a Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack. | ||
| 540 | |a Creative Commons |f by-sa/4.0 |2 cc |4 http://creativecommons.org/licenses/by-sa/4.0 | ||
| 546 | |a German | ||
| 650 | 7 | |a Mechanical engineering & materials |2 bicssc | |
| 653 | |a MEMS-Sensor | ||
| 653 | |a Drehratensensor | ||
| 653 | |a Inertialsensor | ||
| 653 | |a Dämpfung | ||
| 653 | |a Q-Faktor | ||
| 653 | |a MEMS sensor | ||
| 653 | |a gyroscope | ||
| 653 | |a inertial sensor | ||
| 653 | |a damping atmosphere | ||
| 653 | |a Q factor | ||
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| 856 | 4 | 0 | |a www.oapen.org |u https://library.oapen.org/handle/20.500.12657/53694 |7 0 |z OAPEN Library: description of the publication |