Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...
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| Format: | Electronic Book Chapter |
| Published: |
KIT Scientific Publishing
2023
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| Series: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
6 |
| Subjects: | |
| Online Access: | OAPEN Library: download the publication OAPEN Library: description of the publication |
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| 100 | 1 | |a Negara, Christian Emanuel |4 auth | |
| 245 | 1 | 0 | |a Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen |
| 260 | |b KIT Scientific Publishing |c 2023 | ||
| 300 | |a 1 electronic resource (324 p.) | ||
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| 490 | 1 | |a Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung |v 6 | |
| 506 | 0 | |a Open Access |2 star |f Unrestricted online access | |
| 520 | |a Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work. | ||
| 540 | |a Creative Commons |f https://creativecommons.org/licenses/by/4.0/ |2 cc |4 https://creativecommons.org/licenses/by/4.0/ | ||
| 546 | |a German | ||
| 650 | 7 | |a Maths for computer scientists |2 bicssc | |
| 653 | |a imaging; retroreflection; curved surface; ellipsometry; bildgebend; Retroreflexion; gekrümmte Oberfläche; Ellipsometrie; metrology; Messtechnik | ||
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| 856 | 4 | 0 | |a www.oapen.org |u https://library.oapen.org/handle/20.500.12657/64057 |7 0 |z OAPEN Library: description of the publication |