Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen

Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...

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Bibliographic Details
Main Author: Negara, Christian Emanuel (auth)
Format: Electronic Book Chapter
Published: KIT Scientific Publishing 2023
Series:Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung 6
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