Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba

• প্রধান লেখক: Awang, Zaiki (লেখক), Ghodgaonkar, Deepak Kumar (লেখক), Baba, Noor Hasimah (লেখক)
• বিন্যাস: গ্রন্থ
• প্রকাশিত: Institute of Research, Development and Commercialisation (IRDC), 2005.
• বিষয়গুলি: Article; PeerReviewed
• অনলাইন ব্যবহার করুন: Link Metadata

A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence using MNDT. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxia...