Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba
A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence using MNDT. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxia...
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| Автори: | , , |
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| Формат: | Книга |
| Опубліковано: |
Institute of Research, Development and Commercialisation (IRDC),
2005.
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| Онлайн доступ: | Link Metadata |
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| Шифр: |
A1234.567 |
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| Примірник 1 | Доступно |