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Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba

A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence using MNDT. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxia...

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Detaylı Bibliyografya
Asıl Yazarlar:	Awang, Zaiki (Yazar), Ghodgaonkar, Deepak Kumar (Yazar), Baba, Noor Hasimah (Yazar)
Materyal Türü:	Kitap
Baskı/Yayın Bilgisi:	Institute of Research, Development and Commercialisation (IRDC), 2005.
Konular:	Article PeerReviewed
Online Erişim:	Link Metadata
Etiketler:	Etiketle Etiket eklenmemiş, İlk siz ekleyin!

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