Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit
C-axis oriented ZnO films were deposited on SiO2/Si substrates through RF magnetron sputtering, MSM UV photodetector using Ag/ZnO/Ag configuration were fabricated from the as prepared film while the heat treated film was used to fabricate MSM Schottky barrier UV photodetector using Al/ZnO/Ag configu...
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| Main Authors: | , , |
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| Format: | Book |
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Universiti Teknologi MARA, Sabah,
2017-01.
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| Online Access: | Link Metadata |
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Internet
Link Metadata3rd Floor Main Library
| Call Number: |
A1234.567 |
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| Copy 1 | Available |