Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit

• Главные авторы: Ahmad, Halim (Автор), Abdullah, Mat Johar (Автор), Lepit, Ajis (Автор)
• Формат: ‌
• Опубликовано: Universiti Teknologi MARA, Sabah, 2017-01.
• Предметы: Article; PeerReviewed
• Online-ссылка: Link Metadata

C-axis oriented ZnO films were deposited on SiO2/Si substrates through RF magnetron sputtering, MSM UV photodetector using Ag/ZnO/Ag configuration were fabricated from the as prepared film while the heat treated film was used to fabricate MSM Schottky barrier UV photodetector using Al/ZnO/Ag configu...