Structural study of porous Si with different crystal orientation fabricated using two-step alternating current photo-electrochemical etching technique / Fatimah Zulkifli ... [et al.]

• Główni autorzy: Zulkifli, Fatimah (Autor), Radzali, Rosfariza (Autor), Abd Rahim, Alhan Farhanah (Autor), Mahmood, Ainorkhilah (Autor), Abu Bakar, Aslina (Autor)
• Format: Książka
• Wydane: Universiti Teknologi MARA, 2021-10.
• Hasła przedmiotowe: Article; PeerReviewed
• Dostęp online: Link Metadata

Two different crystal orientation of n-type Si substrates n(100) and n(111) were used to fabricate porous structure using two-step Alternating Current Photo- Electrochemical (ACPEC) etching technique. This research aims to investigate the difference of porous structure and properties for different o...