Structural study of porous Si with different crystal orientation fabricated using two-step alternating current photo-electrochemical etching technique / Fatimah Zulkifli ... [et al.]

Two different crystal orientation of n-type Si substrates n(100) and n(111) were used to fabricate porous structure using two-step Alternating Current Photo- Electrochemical (ACPEC) etching technique. This research aims to investigate the difference of porous structure and properties for different o...

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Main Authors: Zulkifli, Fatimah (Author), Radzali, Rosfariza (Author), Abd Rahim, Alhan Farhanah (Author), Mahmood, Ainorkhilah (Author), Abu Bakar, Aslina (Author)
Format: Book
Published: Universiti Teknologi MARA, 2021-10.
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