Structural study of porous Si with different crystal orientation fabricated using two-step alternating current photo-electrochemical etching technique / Fatimah Zulkifli ... [et al.]

• मुख्य लेखकों: Zulkifli, Fatimah (लेखक), Radzali, Rosfariza (लेखक), Abd Rahim, Alhan Farhanah (लेखक), Mahmood, Ainorkhilah (लेखक), Abu Bakar, Aslina (लेखक)
• स्वरूप: पुस्तक
• प्रकाशित: Universiti Teknologi MARA, 2021-10.
• विषय: Article; PeerReviewed
• ऑनलाइन पहुंच: Link Metadata

Two different crystal orientation of n-type Si substrates n(100) and n(111) were used to fabricate porous structure using two-step Alternating Current Photo- Electrochemical (ACPEC) etching technique. This research aims to investigate the difference of porous structure and properties for different o...