Structural study of porous Si with different crystal orientation fabricated using two-step alternating current photo-electrochemical etching technique / Fatimah Zulkifli ... [et al.]
Two different crystal orientation of n-type Si substrates n(100) and n(111) were used to fabricate porous structure using two-step Alternating Current Photo- Electrochemical (ACPEC) etching technique. This research aims to investigate the difference of porous structure and properties for different o...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Book |
| Published: |
Universiti Teknologi MARA,
2021-10.
|
| Subjects: | |
| Online Access: | Link Metadata |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|