Fabrication and evaluations of PZT thin films by RF reactive sputtering using solid oxygen-source / Sukreen Hana Herman, Kimihiro Sasaki and Tomonobu Hata
PZT films were prepared on Pt/Ti/SiO2/Si substrate by RF reactive sputtering apparatus using metal-oxide composite ZrTi+PbO2 powder and pellet targets. The main sputtering conditions are as follows: sputtering gas is argon and oxygen, gas pressure is 1810-2Torr, 02/Ar flow rate is 0% and 4.2%, subst...
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2004.
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| LEADER | 00000 am a22000003u 4500 | ||
|---|---|---|---|
| 001 | repouitm_52734 | ||
| 042 | |a dc | ||
| 100 | 1 | 0 | |a Herman, Sukreen Hana |e author |
| 700 | 1 | 0 | |a Kimihiro, Sasaki |e author |
| 700 | 1 | 0 | |a Tomonobu, Hata |e author |
| 245 | 0 | 0 | |a Fabrication and evaluations of PZT thin films by RF reactive sputtering using solid oxygen-source / Sukreen Hana Herman, Kimihiro Sasaki and Tomonobu Hata |
| 260 | |c 2004. | ||
| 500 | |a https://ir.uitm.edu.my/id/eprint/52734/1/52734.PDF | ||
| 520 | |a PZT films were prepared on Pt/Ti/SiO2/Si substrate by RF reactive sputtering apparatus using metal-oxide composite ZrTi+PbO2 powder and pellet targets. The main sputtering conditions are as follows: sputtering gas is argon and oxygen, gas pressure is 1810-2Torr, 02/Ar flow rate is 0% and 4.2%, substrate temperature is 200 (unintentionally heated), 450 and 550°C. PbOz target occupation is 300%. It is confirmed that PbOz pellet target has the potential to be the oxygen-source during the deposition with a high deposition rate. Perovskite PZT peak was observed in XRD measurement for film grown with PbO2 pellet target without introducing, my oxygen gas and with a small target occupation during deposition. | ||
| 546 | |a en | ||
| 690 | |a Temperature | ||
| 690 | |a Electric apparatus and materials. Electric circuits. Electric networks | ||
| 690 | |a Oxygen. Ozone | ||
| 655 | 7 | |a Conference or Workshop Item |2 local | |
| 655 | 7 | |a PeerReviewed |2 local | |
| 787 | 0 | |n https://ir.uitm.edu.my/id/eprint/52734/ | |
| 856 | 4 | 1 | |u https://ir.uitm.edu.my/id/eprint/52734/ |z Link Metadata |